TITLE

Direct detection of atomic arsenic desorption from Si(100)

AUTHOR(S)
Alstrin, April L.; Strupp, Paul G.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/9/1993, Vol. 63 Issue 6, p815
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the use of photon laser ionization technique to demonstrate the desorption of arsenic atoms from silicon substrate. Utilization of time-of-flight mass spectroscopy to monitor continuous flux of arsenic atoms; Employment of optical pyrometer to calibrate the substrate temperature; Lack of contaminants in the silicon substrate.
ACCESSION #
4227501

 

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