TITLE

Fabrication of silicon nanostructures with a scanning tunneling microscope

AUTHOR(S)
Snow, E.S.; Campbell, P.M.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/9/1993, Vol. 63 Issue 6, p749
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a method for fabricating silicon nanostructures with a scanning tunneling microscope. Involvement of direct chemical modification of hydrogen-passivated silicon surface; Mechanism of liquid etching for silicon nanostructures; Discussion on the lack of etch degradation in the modified surface.
ACCESSION #
4227479

 

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