TITLE

Vertical and lateral hole aluminum filling characteristics employing electron cyclotron

AUTHOR(S)
Shingubara, S.; Morimoto, N.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/9/1993, Vol. 63 Issue 6, p737
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the filling of submicrometer vertical and lateral holes by employing electron cyclotron resonance aluminum sputtering. Formation of dense aluminum islands of the contact holes; Distribution of the microwave electric field; Estimation of the activation energy of the filling process.
ACCESSION #
4227475

 

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