TITLE

Low-energy oxygen ion bombardment effect on BaTiO[sub 3] thin films grown by multi-ion-beam

AUTHOR(S)
Peng, C.-J.; Hu, H.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/9/1993, Vol. 63 Issue 6, p734
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the employment of oxygen ion bombardment to modify the physical properties of barium titanate thin films grown by multi-ion-beam reactive sputtering technique. Changes in the void network and grain boundary structures; Variation of the bombarding energy; Impact of oxygen ion bombardment on morphology and dielectric constants of the thin films.
ACCESSION #
4227474

 

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