TITLE

Lifetime measurements on silicon-on-insulator wafers

AUTHOR(S)
Freeouf, J.L.; Braslau, N.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/12/1993, Vol. 63 Issue 2, p189
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Measures the minority carrier lifetime of silicon-on-insulator wafers on superficial silicon layer. Excitation of carriers by short wavelength photons; Detection of carriers through microwave reflectance; Elimination of free surface recombination velocity by hydrogen fluoride passivation.
ACCESSION #
4227442

 

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