TITLE

Conformal chemical beam deposition of thin metal film for fabricating high density trench

AUTHOR(S)
Hsu, David S.Y.; Gray, Henry F.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/12/1993, Vol. 63 Issue 2, p159
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the conformal chemical beam deposition of thin metal films for fabricating high density trench capacitor cells. Deposition of platinum films on the surface arrays of oxidized silicon trenches; Application of several electron microscopies for film analysis; Absence of impurities on film surfaces.
ACCESSION #
4227432

 

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