Optical emission from the laser-induced plasma during excimer laser etching of diamondlike

Seth, Jayshree; Padiyath, R.
July 1993
Applied Physics Letters;7/12/1993, Vol. 63 Issue 2, p126
Academic Journal
Examines the optical emission from laser-induced plasma plume during KrF excimer laser etching of diamondlike carbon films. Dominance of C[sub 2] Swan bands in visible and ultraviolet wavelength regions; Observation of high emission intensities during low-density film etching; Calculation for the molecular vibrational temperature of C[sub 2] and CN radicals.


Related Articles

  • Novel technique for low-jitter dual-laser synchronization in a thin film deposition system. Mukherjee, Pritish; Cuff, John B.; Witanachchi, Sarath // Review of Scientific Instruments;May2001, Vol. 72 Issue 5, p2380 

    The need for precise laser pulse synchronization in a dual-laser ablation system to optimize the quality of the deposited thin films has been previously demonstrated. We present, in this article, a novel technique for the synchronization of an excimer and a CO[sub 2] laser with synchronization...

  • Micropatterning of high Tc films with an excimer laser. Mannhart, J.; Scheuermann, M.; Tsuei, C. C.; Oprysko, M. M.; Chi, C. C.; Umbach, C. P.; Koch, R. H.; Miller, C. // Applied Physics Letters;4/11/1988, Vol. 52 Issue 15, p1271 

    Micron-wide lines of high Tc Y-Ba-Cu-O have been successfully patterned by ablating the films with a pulsed excimer laser. The high Tc films are mounted onto a computer-controlled stepping stage and irradiated with a demagnified image of a variable-size rectangular aperture. This technique has...

  • Selective area laser photodeposition of transparent conductive SnO2 films. Kunz, R. R.; Rothschild, M.; Ehrlich, D. J. // Applied Physics Letters;4/24/1989, Vol. 54 Issue 17, p1631 

    The deposition of SnO2 films has been demonstrated using an ArF (193 nm) excimer laser to drive the photochemical reactions of mixed SnCl4 and N2 O vapors. Without any annealing, films 100 nm thick grown on room-temperature substrates have resistivities as low as 0.04 Ω cm. The optical band...

  • Multilayer YBa2Cu3Ox-SrTiO3-YBa2Cu3Ox films for insulating crossovers. Kingston, John J.; Wellstood, Frederick C.; Lerch, Philippe; Miklich, Andrew H.; Clarke, John // Applied Physics Letters;1/8/1990, Vol. 56 Issue 2, p189 

    We describe our procedure for fabricating YBa2Cu3Ox-SrTiO3-YBa2Cu3Ox thin-film trilayer structures. Each film is grown in situ by excimer laser deposition onto a heated (100)MgO substrate. The geometrical configuration of each layer is defined by a metal mask; the vacuum chamber is opened...

  • Controlling crystal quality and orientation of pulsed-laser-deposited BaTiO[sub 3] thin films by the kinetic energy of the film-forming particles. Gottmann, J.; Kreutz, E.W. // Applied Physics A: Materials Science & Processing;2000, Vol. 70 Issue 3, p275 

    The deposition of BaTiO[sub 3] thin films by pulsed excimer laser radiation (248 nm) on Pt/Ti/Si(111) and Pt/Ti/Si(100) substrates is investigated as a function of the processing variables laser fluence, processing gas pressure, and target-to-substrate distance under conditions of temporal...

  • Excellent thermal stability of superconducting properties in YBa[sub 2]Cu[sub 3]O[sub 7] films.... Singh, Rajiv K.; Bhattacharya, D.; Harkness, S.; Narayan, J.; Diwari, P.; Jahncke, Catherine; Sparks, R.; Paesler, M. // Applied Physics Letters;9/9/1991, Vol. 59 Issue 11, p1380 

    Investigates the microstructure and superconducting properties of YBa[sub 2]Cu[sub 3]O[sub 7] films irradiated by pulsed excimer lasers. Deposition of the thin films; Critical current densities; Thermal stability.

  • Erratum: ‘‘Epitaxial growth of RbTiOPO4 films on KTiOPO4 substrates by excimer laser ablation technique’’ [J. Appl. Phys. 76, 8215 (1994)]. Liu, Z. G.; Liu, J. M.; Ming, N. B.; Wang, J. Y.; Shi, L. P.; Liu, Y. G.; Jiang, M. H. // Journal of Applied Physics;5/15/1995, Vol. 77 Issue 10, p5487 

    Presents corrections for the study 'Epitaxial Growth of RbTiOPO4 Films on KTiOPO4 Substrates by Excimer Laser Ablation Technique,' by Z.G. Liu, J.M. Liu, N.B. Ming, J.Y. Wang, L.P. Shi, Y.G. Liu and M.H. Jiang.

  • New ripple patterns observed in excimer-laser irradiated SiO[sub 2]/polycrystalline.... Giust, G.K.; Sigmon, T.W. // Applied Physics Letters;6/30/1997, Vol. 70 Issue 26, p3552 

    Observes ripple formation mechanism in excimer-laser irradiated polycrystalline silicon films on oxidized silicon wafers. Creation of patterns on different semiconductors by single-laser irradiation; Arrangement of the wave fronts of the ripples in chaotic patterns; Manipulation of wave fronts...

  • Thermally stabilized photoinduced Bragg gratings. Nishii, Junji; Kintaka, Kenji; Nishiyama, Hiroaki; Sano, Tomokazu; Ohmura, Etsuji; Miyamoto, Isamu // Applied Physics Letters;9/23/2002, Vol. 81 Issue 13, p2364 

    Bragg gratings were printed in Ge-SiO[sub 2] and Ge-B-SiO[sub 2] thin glass films by KrF excimer laser irradiation through a phase mask. The diffraction efficiency of the grating printed in the Ge-B-SiO[sub 2] film was approximately one order of magnitude greater than that of the Ge-SiO[sub 2]...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics