In situ layer-by-layer growth of YBa[sub 2]Cu[sub 3]O[sub 7-x] thin films by multitarget sputter

Yang, K.-Y.; Dilorio, M.S.
December 1992
Applied Physics Letters;12/7/1992, Vol. 61 Issue 23, p2826
Academic Journal
Examines the fabrication of yttrium (Y) barium (Ba)[sub 2] copper[sub 3] oxide [sub 7-x] thin films through multitarget sputter deposition. Deposition of yttrium, barium and copper metals in the atomic monolayer to construct the perovskite structure; Indication of x-ray diffraction; Measurement of the films in the zero magnetic field.


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