TITLE

Coimplantation and electrical activity of C in GaAs: Stoichiometry and damage effects

AUTHOR(S)
Moll, A.J.; Kin Man Yu
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/11/1992, Vol. 60 Issue 19, p2383
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the coimplantation and electrical activity of carbon in gallium arsenide (GaAs). Effect of implant damage and stoichiometry on activation; List of elements coimplanted in GaAs; Percentage of activation achieved during Ga coimplantation.
ACCESSION #
4227371

 

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