Coimplantation and electrical activity of C in GaAs: Stoichiometry and damage effects

Moll, A.J.; Kin Man Yu
May 1992
Applied Physics Letters;5/11/1992, Vol. 60 Issue 19, p2383
Academic Journal
Investigates the coimplantation and electrical activity of carbon in gallium arsenide (GaAs). Effect of implant damage and stoichiometry on activation; List of elements coimplanted in GaAs; Percentage of activation achieved during Ga coimplantation.


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