TITLE

High-resolution electroless deposits on alumina from ultraviolet exposure of a Pt metalorganic

AUTHOR(S)
Mance, Andrew M.
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/11/1992, Vol. 60 Issue 19, p2350
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the high-resolution of electroless deposits on alumina from ultraviolet exposure of a metalorganic (MO) platinum (Pt) compound. Application of photochemical and electroless metallization techniques; Use of a quartz photomask for the selective exposure of Pt MO to ultraviolet light; Range of the total Pt consumption.
ACCESSION #
4227360

 

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