TITLE

X-ray photoelectron spectroscopy of initial stages of nucleation and growth of diamond thin

AUTHOR(S)
Waite, M.M.; Shah, S.I.
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/11/1992, Vol. 60 Issue 19, p2344
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Provides an X-ray photoelectron spectroscopy on diamond thin films deposited by microwave assisted chemical vapor deposition. Application of a hydrogen-methane plasma; Analysis of films grown for different lengths of time; Effect of carbon-silicon substrate interaction on the silicon carbide present in the initial stages of nucleation.
ACCESSION #
4227358

 

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