X-ray photoelectron spectroscopy of initial stages of nucleation and growth of diamond thin

Waite, M.M.; Shah, S.I.
May 1992
Applied Physics Letters;5/11/1992, Vol. 60 Issue 19, p2344
Academic Journal
Provides an X-ray photoelectron spectroscopy on diamond thin films deposited by microwave assisted chemical vapor deposition. Application of a hydrogen-methane plasma; Analysis of films grown for different lengths of time; Effect of carbon-silicon substrate interaction on the silicon carbide present in the initial stages of nucleation.


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