TITLE

Low-leakage thin-films superconductor-insulator-normal metal tunnel junctions on

AUTHOR(S)
Hou, C.J.; Fink, R.L.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/9/1992, Vol. 60 Issue 10, p1262
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops thin film semiconductors by thermal co-evaporation and radio frequency sputtering. Fabrication of thin films superconductor-insulator-normal metal tunnel junctions; Exhibition of low leakage in the tunnel junctions; Optimization of the growth temperature, oxygen partial pressure, and target stoichiometry to grow films.
ACCESSION #
4227348

 

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