Creation and passivation of electron traps in n-InP treated with hydrogen plasma

Sugino, Takashi; Ninomiya, Hideaki
March 1992
Applied Physics Letters;3/9/1992, Vol. 60 Issue 10, p1226
Academic Journal
Examines the deep electron traps in n-indium phosphide treated with hydrogen plasma using isothermal capacitance transient spectroscopy measurements. Detection of five electron trap levels with activation energies; Enhancement of the density of the first level electron traps; Creation of second and fifth electron traps.


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