Mechanical strength of silicon crystals with oxygen and/or germanium impurities

Fukuda, Tetsuo; Ohsawa, Akira
March 1992
Applied Physics Letters;3/9/1992, Vol. 60 Issue 10, p1184
Academic Journal
Examines the mechanical strength of epitaxial and Czochralski (CZ) silicon crystals with germanium concentrations using an indentation test. Increase of the strength of CZ crystals for germanium concentration; Description of CZ crystal alloyed with germanium; Occupation of oxygen atoms in the interstitial sites next to the germanium atoms.


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