TITLE

Significant improvement in depth resolution of Cr/Ni interfaces by secondary ion mass

AUTHOR(S)
Kyung Joong Kim; Dae Won Moon
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/9/1992, Vol. 60 Issue 10, p1178
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the depth resolution in secondary ion mass spectrometry of chromium or nickel thin films as a function of ion beam incidence angle. Increase of the incidence angle from the surface; Improvement of the depth resolution; Relation of depth resolution to surface topographic development.
ACCESSION #
4227320

 

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