Significant improvement in depth resolution of Cr/Ni interfaces by secondary ion mass

Kyung Joong Kim; Dae Won Moon
March 1992
Applied Physics Letters;3/9/1992, Vol. 60 Issue 10, p1178
Academic Journal
Examines the depth resolution in secondary ion mass spectrometry of chromium or nickel thin films as a function of ion beam incidence angle. Increase of the incidence angle from the surface; Improvement of the depth resolution; Relation of depth resolution to surface topographic development.


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