Epitaxial growth of BaTiO[sub 3] thin films by plasma-enhanced metalorganic chemical vapor

Chern, C.S.; Zhao, J.
March 1992
Applied Physics Letters;3/2/1992, Vol. 60 Issue 9, p1144
Academic Journal
Examines the epitaxial growth of BaTiO[sub 3] thin films by plasma enhanced metalorganic chemical vapor deposition. Orientation of the thin films; Confirmation of the high degree of epitaxial crystallinity; Morphology of the film surface.


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