TITLE

Epitaxial growth of BaTiO[sub 3] thin films by plasma-enhanced metalorganic chemical vapor

AUTHOR(S)
Chern, C.S.; Zhao, J.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/2/1992, Vol. 60 Issue 9, p1144
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the epitaxial growth of BaTiO[sub 3] thin films by plasma enhanced metalorganic chemical vapor deposition. Orientation of the thin films; Confirmation of the high degree of epitaxial crystallinity; Morphology of the film surface.
ACCESSION #
4227309

 

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