Backside secondary ion mass spectrometry study of a Ge/Pd ohmic contact to InP

Schwarz, S.A.; Pudensi, M.A.A.
March 1992
Applied Physics Letters;3/2/1992, Vol. 60 Issue 9, p1123
Academic Journal
Determines the high-resolution secondary ion mass spectrometry depth profiles of germanium/palladium (Pd) ohmic contacts on indium phosphide. Formation of a Pd-indium-phosphorus alloy layer; Dependence of the thickness of the layer on the amount of metallic Pd; Detection of germanium on the regrown region.


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