TITLE

Etching characteristics of Al[sub x]Ga[sub 1-x]As in (NH[sub 4])[sub 2]S[sub x] solutions

AUTHOR(S)
Jong-Wook Seo; Koker, Terry
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/2/1992, Vol. 60 Issue 9, p1114
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the etching characteristics of Al[sub x]Ga[sub 1-x]As in (NH[sub 4])[sub 2]S[sub x] solution. Variation of excess sulfur concentrations and temperatures; Increase of etch rates; Discussion of possible chemical processes involved.
ACCESSION #
4227299

 

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