TITLE

Stress and its effect on the interdiffusion in Si[sub 1-x]Ge[sub x]/Si superlattices

AUTHOR(S)
Prokes, S.M.; Glembocki, O.J.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/2/1992, Vol. 60 Issue 9, p1087
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines effects of stress on the interdiffusion behavior in long-period Si[sub 0.7]Ge[sub 0.3]/Si bilayers. Use of x-ray diffraction and Raman spectroscopy; Determination of activation energy; Enhancement of germanium diffusion into the silicon barriers.
ACCESSION #
4227290

 

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