TITLE

Astigmatism correction in x-ray scanning photoemission microscope with use of elliptical zone plate

AUTHOR(S)
Ade, H.; Ko, C.-H.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/2/1992, Vol. 60 Issue 9, p1040
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the impact of an elliptical, high resolution zone plate on the performance of an initially astigmatic soft x-ray scanning photoemission microscope. Improvement in spatial resolution; Domination of source size and chromatic aberrations in the resolution; Possibility of a future gain in resolution.
ACCESSION #
4227274

 

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