All-silicon integrated Fabry–Pérot cavity for volume refractive index measurement in microfluidic systems

St-Gelais, R.; Masson, J.; Peter, Y.-A.
June 2009
Applied Physics Letters;6/15/2009, Vol. 94 Issue 24, p243905
Academic Journal
We report a refractive index (RI) sensor based on the use of vertically etched silicon Bragg reflectors. The device is robust and performs measurements through tens of micrometers of liquid. A sensitivity of 907 nm/RIU (RI units) and a resolution of 1.7×10-5 RIU are obtained and are in good agreement with optical simulations. This resolution is the highest reported for a volume RI sensor integrated with a microfluidic system. Expected applications for the sensor in the fields of single cell characterization and chip based liquid chromatography are discussed.


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