Room-temperature temperature sensitivity and resolution of doped-silicon microcantilevers

Corbin, Elise A.; Park, Keunhan; King, William P.
June 2009
Applied Physics Letters;6/15/2009, Vol. 94 Issue 24, p243503
Academic Journal
An atomic force microscope microcantilever having an integrated solid-state resistor can be used as a heater or a resistive thermometer. The temperature sensitivity and resolution of these cantilevers were investigated under steady and periodic operation near 300 K. Overall, the temperature coefficient of resistance of the cantilever is 0.0029 K-1 at 300 K. When the cantilever is placed under periodic heating conditions the temperature resolution is measured as low as 5 mK. This characterization of heated cantilevers enables precise measurement of small temperature changes, and could improve nanoscale thermal measurements.


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