TITLE

Low temperature synthesis of Ge nanocrystals in SiO[sub 2]

AUTHOR(S)
Craciun, Valentin; Boyd, Ian W.
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/19/1994, Vol. 65 Issue 25, p3233
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a technique for the synthesis of germanium nanocrystals embedded in silicon dioxide. Compatibility of the method with silicon microelectronic technology; Reliance of the technique upon low temperature ultraviolet oxidation of Si[sub 0.8]Ge[sub 0.2] strained layers; Crystalline structure of the nanoparticles.
ACCESSION #
4221738

 

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