Relationship between radiation response and density of buried oxide in

Mrstik, B.J.; McMarr, P.J.
December 1994
Applied Physics Letters;12/5/1994, Vol. 65 Issue 23, p2993
Academic Journal
Investigates the relationship between radiation response and density of buried oxide in separation-by-implantation-of-oxygen material. Effects of minor variations in process conditions on oxide density; Occurrence of abrupt back interface; Importance of spectroscopic ellipsometry in optimizing processing conditions.


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