TITLE

Novel chemical routes to silicon-germanium-carbon materials

AUTHOR(S)
Kouvetakis, John; Todd, Michael
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/5/1994, Vol. 65 Issue 23, p2960
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents novel chemical routes to synthesize solid solutions of cubic silicon carbide-germanium carbide and diamond-structure Si[sub 1-x-y]Ge[sub x]C[sub y] materials. Use of molecular precursors and ultrahigh vacuum chemical vapor deposition techniques; Production of films with carbon compositions; Chemical purity of the materials.
ACCESSION #
4221694

 

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