Novel chemical routes to silicon-germanium-carbon materials

Kouvetakis, John; Todd, Michael
December 1994
Applied Physics Letters;12/5/1994, Vol. 65 Issue 23, p2960
Academic Journal
Presents novel chemical routes to synthesize solid solutions of cubic silicon carbide-germanium carbide and diamond-structure Si[sub 1-x-y]Ge[sub x]C[sub y] materials. Use of molecular precursors and ultrahigh vacuum chemical vapor deposition techniques; Production of films with carbon compositions; Chemical purity of the materials.


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