Low pressure metalorganic chemical-vapor deposition of cubic GaN over (100) GaAs substrates

Kuznia, J.N.; Yang, J.W.
November 1994
Applied Physics Letters;11/7/1994, Vol. 65 Issue 19, p2407
Academic Journal
Presents the low pressure metal organic chemical vapor deposition of single crystal cubic GaN films over GaAS. Estimation of the band-gap for c-GaN; Data presented to establish the quality of a 8.0-mum-thick cubic GaN film over GaAs substrate; Preliminary measurement results for the carrier density and mobility of as-deposited c-GaN film.


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