Carbon doping of AlAs using CCl[sub 4] and CBr[sub 4] during growth by metalorganic

Abernathy, C.R.; MacKenzie, J.D.
October 1994
Applied Physics Letters;10/24/1994, Vol. 65 Issue 17, p2205
Academic Journal
Investigates the carbon doping of AlAs using CCl[sub 4] and CBr[sub 4] during growth by metalorganic molecular-beam epitaxy. Achievement of hole concentration in as-deposited AlAs layers; Effect of the attempt to increase hole concentration in as-grown material on hole concentration; Method of increasing the maximum achievable hole concentration.


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