Nanocrystal size modifications in porous silicon by preanodization ion implantation

Pavesi, L.; Giebel, G.
October 1994
Applied Physics Letters;10/24/1994, Vol. 65 Issue 17, p2182
Academic Journal
Describes the nanocrystal size modifications in porous silicon by preanodization ion implantation. Methods used to determine the structure of porous silicon samples; Observation of a porosity increase, a blue shift of the luminescence peak and a widening of the phonon resonance; Effect of the increased resistivity of the silicon wafer on the process.


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