TITLE

Selective ablation of a hydrogenated amorphous silicon thin layer by the second-harmonic

AUTHOR(S)
Sumiyoshi, Tetsumi; Ninomiya, Yutaka
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/24/1994, Vol. 65 Issue 17, p2127
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the selective ablation of a hydrogenated amorphous silicon thin layer by the second-harmonic radiation of a transversely excited atmospheric carbon dioxide laser. Vibrational energy of the Si--H bonds contained in a-Si:H at 10 at percent; Effect of the vibrational energy on the layer.
ACCESSION #
4221596

 

Related Articles

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics