High-energy electron-free plasma source

Yabe, Eiji; Takahashi, Kenjie
August 1994
Applied Physics Letters;8/8/1994, Vol. 65 Issue 6, p694
Academic Journal
Examines the development of radio-frequency plasma source with magnetic ring-cusp field. Determination of electron energy distribution function and electron density; Use of an asymmetrical double probe; Exclusion of high-energy electrons; Comparison of the electron density for helium to the radio frequency power.


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