TITLE

High-energy electron-free plasma source

AUTHOR(S)
Yabe, Eiji; Takahashi, Kenjie
PUB. DATE
August 1994
SOURCE
Applied Physics Letters;8/8/1994, Vol. 65 Issue 6, p694
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the development of radio-frequency plasma source with magnetic ring-cusp field. Determination of electron energy distribution function and electron density; Use of an asymmetrical double probe; Exclusion of high-energy electrons; Comparison of the electron density for helium to the radio frequency power.
ACCESSION #
4221561

 

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