BaSi[sub 2] and thin film alkaline earth silicides on silicon

McKee, R.A.; Walker, F.J.
November 1993
Applied Physics Letters;11/15/1993, Vol. 63 Issue 20, p2818
Academic Journal
Examines the epitaxial structural development and surface reactions of alkaline earth metal with silicon as a function of surface coverage. Development of highly ordered submonolayer silicides; Characterization of barium reaction from submonolayer structures to the thick film orthorhombic phase; Quality of the films produced.


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