TITLE

BaSi[sub 2] and thin film alkaline earth silicides on silicon

AUTHOR(S)
McKee, R.A.; Walker, F.J.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/15/1993, Vol. 63 Issue 20, p2818
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the epitaxial structural development and surface reactions of alkaline earth metal with silicon as a function of surface coverage. Development of highly ordered submonolayer silicides; Characterization of barium reaction from submonolayer structures to the thick film orthorhombic phase; Quality of the films produced.
ACCESSION #
4221539

 

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