TITLE

Dynamic mode force microscopy for the detection of lateral and vertical electrostatic forces

AUTHOR(S)
Watanabe, S.; Hane, K.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/1/1993, Vol. 63 Issue 18, p2573
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Introduces a dynamic-mode force microscope for sensing the directional force gradients. Detection of the vertical and lateral components of electrostatic force; Presentation of experimental setup of the proposed microscope; Investigation on the distribution of electrostatic force acting on fine electrodes.
ACCESSION #
4221503

 

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