TITLE

Fluid simulations of radio frequency glow discharges: Two-dimensional argon discharge including

AUTHOR(S)
Lymberopoulos, Dimitris P.; Economou, Demetre J.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/1/1993, Vol. 63 Issue 18, p2478
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports 2 dimensional fluid simulation of coupled glow-discharge/neutral-transport-reaction system carried out in gaseous electronics conference reference cell geometry. Study on argon discharge including metastables; Use of Newton-Raphson method; Manifestation of metastable density profile.
ACCESSION #
4221471

 

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