TITLE

Beryllium delta doping studies in InP and Ga[sub 0.47]In[sub 0.53]As during metalorganic

AUTHOR(S)
Ritter, Dan; Hamm, R.A.
PUB. DATE
September 1993
SOURCE
Applied Physics Letters;9/13/1993, Vol. 63 Issue 11, p1543
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the delta doping study of beryllium (Be) in indium phosphide (InP) and Ga[sub 0.47]In[sub 0.53]As semiconductors during metalorganic molecular beam epitaxy. Removal of Be atom from the surface; Account on the upper limit for delta doping of InP and GaInAs; Duration of the growth interruption.
ACCESSION #
4221448

 

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