TITLE

Improved strain analysis in semiconductor crystals by x-ray diffractometry enhanced with ultrasound

AUTHOR(S)
Zolotoyabko, E.; Sander, B.
PUB. DATE
September 1993
SOURCE
Applied Physics Letters;9/13/1993, Vol. 63 Issue 11, p1540
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a method for studying the small strains in semiconductor crystals. Use of double-crystal x-ray diffractometry and high-frequency ultrasound; Effects of lattice distortions on diffraction profile; Characterization of strain levels in single crystals.
ACCESSION #
4221447

 

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