New class of Si-based superlattices: Alternating layers of crystalline Si and porous amorphous

Fathauer, R.W.; George, T.
November 1992
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2350
Academic Journal
Fabricates superlattices consisting of alternating layers of crystalline silicon and porous amorphous Si[sub 1-x]Ge[sub x] alloys. Details on the epitaxial growth; Observation of a high selectivity in the conversion of the alloy layers; Dependence of the degree of selectivity on alloy layer thickness and strain.


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