TITLE

New class of Si-based superlattices: Alternating layers of crystalline Si and porous amorphous

AUTHOR(S)
Fathauer, R.W.; George, T.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2350
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Fabricates superlattices consisting of alternating layers of crystalline silicon and porous amorphous Si[sub 1-x]Ge[sub x] alloys. Details on the epitaxial growth; Observation of a high selectivity in the conversion of the alloy layers; Dependence of the degree of selectivity on alloy layer thickness and strain.
ACCESSION #
4221411

 

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