CO[sub 2] laser assisted particle removal threshold measurements

Lee, S.J.; Imen, K.
November 1992
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2314
Academic Journal
Measures the threshold for the carbon dioxide laser assisted particle removal (LAPR) on artificially contaminated silicon substrates. Characterization of LAPR process; Estimation of the temperature rise during laser irradiation of water; Observation on a uniform high density particle distribution.


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