TITLE

CO[sub 2] laser assisted particle removal threshold measurements

AUTHOR(S)
Lee, S.J.; Imen, K.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2314
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Measures the threshold for the carbon dioxide laser assisted particle removal (LAPR) on artificially contaminated silicon substrates. Characterization of LAPR process; Estimation of the temperature rise during laser irradiation of water; Observation on a uniform high density particle distribution.
ACCESSION #
4221399

 

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