TITLE

In situ emissivity measurements to probe the phase transformations during rapid thermal

AUTHOR(S)
Schreutelkamp, R.J.; Vandenabeele, P.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2296
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the usage of in situ emissivity and temperature measurements on phase transformations occurring during cobalt silicidation. Significance of the method in controlling the silicidation process; Determination of the factors influencing silicidation; Insights in the reaction mechanism of cobalt on silicon under various processing conditions.
ACCESSION #
4221393

 

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