In situ emissivity measurements to probe the phase transformations during rapid thermal

Schreutelkamp, R.J.; Vandenabeele, P.
November 1992
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2296
Academic Journal
Examines the usage of in situ emissivity and temperature measurements on phase transformations occurring during cobalt silicidation. Significance of the method in controlling the silicidation process; Determination of the factors influencing silicidation; Insights in the reaction mechanism of cobalt on silicon under various processing conditions.


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