TITLE

Nanometer-scale lithography using the atomic force microscope

AUTHOR(S)
Majumdar, A.; Oden, P.I.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/9/1992, Vol. 61 Issue 19, p2293
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the use of atomic force microscope (AFM) for nanometer-scale lithography of ultrathin films of poly (methymetacrylate) (PMMA). Modification of the PMMA films; Significance of low-energy electrons in the metal-coated AFM tips; Fabrication of a line pattern with 68 nanometer line periodicity.
ACCESSION #
4221392

 

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