TITLE

Schottky barrier heights of the amorphous interlayer/Si interfaces in titanium thin films on

AUTHOR(S)
Liauh, H.R.; Chen, M.C.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/2/1992, Vol. 61 Issue 18, p2167
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Measures the Schottky barriers heights of amorphous interlayer or silicon interfaces in titanium thin films on silicon. Observation of a-interlayers formed by transmission microscopy; Formation of homogeneous metal a-interlayers or silicon interfaces; Clarification of the Schottky barrier height formation mechanisms.
ACCESSION #
4221353

 

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