TITLE

Synthesis and electrical characterization of boron-doped thin diamond films

AUTHOR(S)
Masood, A.; Aslam, M.
PUB. DATE
October 1992
SOURCE
Applied Physics Letters;10/12/1992, Vol. 61 Issue 15, p1832
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electrical properties of polycrystalline diamond films synthesized by hot-filament chemical vapor deposition. Utilization of in situ doping through pure boron powder; Use of scanning electron microscopy and Raman spectroscopy to assess the quality of deposited films; Calculation of dopant activation energies and boron concentration.
ACCESSION #
4221328

 

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