Synthesis and electrical characterization of boron-doped thin diamond films

Masood, A.; Aslam, M.
October 1992
Applied Physics Letters;10/12/1992, Vol. 61 Issue 15, p1832
Academic Journal
Examines the electrical properties of polycrystalline diamond films synthesized by hot-filament chemical vapor deposition. Utilization of in situ doping through pure boron powder; Use of scanning electron microscopy and Raman spectroscopy to assess the quality of deposited films; Calculation of dopant activation energies and boron concentration.


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