TITLE

Metal deposition onto oxides: An unusual low initial sticking probability for copper on SiO[sub 2]

AUTHOR(S)
Xueping Xu; Goodman, D. Wayne
PUB. DATE
October 1992
SOURCE
Applied Physics Letters;10/12/1992, Vol. 61 Issue 15, p1799
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the deposition of copper on thin silica film. Use of temperature programmed desorption to measure the initial sticking probability of copper; Factors contributing to errors in estimating metal growth rate; Attribution of adsorbed water to the initial sticking probability.
ACCESSION #
4221317

 

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