TITLE

Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CF[sub x] at the

AUTHOR(S)
Tas, G.; Stoner, R.J.
PUB. DATE
October 1992
SOURCE
Applied Physics Letters;10/12/1992, Vol. 61 Issue 15, p1787
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the use of picosecond ultrasonic technique to detect interfacial fluorocarbon layers at aluminum/silicon (Al/Si) interface. Reduction in acoustic damping and heat loss from aluminum film into the Si substrate; Identification of organic/polymeric contaminants; Utilization of ion etching process in the deposition of fluorocarbon layers.
ACCESSION #
4221313

 

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