TITLE

32 GHz metal-semiconductor-metal photodetectors on crystalline silicon

AUTHOR(S)
Chou, Stephen Y.; Yue Liu
PUB. DATE
October 1992
SOURCE
Applied Physics Letters;10/12/1992, Vol. 61 Issue 15, p1760
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication of metal-semiconductor-metal photodetectors grown on crystalline silicon. Use of electron beam lithography to define finger spacing and bandwidth; Determination of the parasitic capacitance of the detector; Correlation between finger spacing and response time.
ACCESSION #
4221304

 

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