Nonuniformities of native oxides on Si(001) surfaces formed during wet chemical cleaning

Aoyama, T.; Yamazaki, T.
July 1992
Applied Physics Letters;7/6/1992, Vol. 61 Issue 1, p102
Academic Journal
Examines the uniformity of native oxide formed on silicon (Si) surfaces during wet chemical cleaning. Methods used to study the Si oxides; Ways to determine the uniformity; Use of atomic force microscopy.


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