TITLE

Nonuniformities of native oxides on Si(001) surfaces formed during wet chemical cleaning

AUTHOR(S)
Aoyama, T.; Yamazaki, T.
PUB. DATE
July 1992
SOURCE
Applied Physics Letters;7/6/1992, Vol. 61 Issue 1, p102
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the uniformity of native oxide formed on silicon (Si) surfaces during wet chemical cleaning. Methods used to study the Si oxides; Ways to determine the uniformity; Use of atomic force microscopy.
ACCESSION #
4221251

 

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