Synchrotron radiation-assisted silicon homoepitaxy at 100 degrees C using

Nara, Yasuo; Sugita, Yoshihiro
July 1992
Applied Physics Letters;7/6/1992, Vol. 61 Issue 1, p93
Academic Journal
Investigates the synchrotron radiation-assisted silicon homoepitaxy using silicon hydrogen mixture. Use of synchrotron radiation; Role of photogenerated radicals in the epitaxial growth reaction; Ways to deposit the epitaxial silicon film.


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