Epitaxial growth of (011) Al on (100) Si by vapor deposition

Thangaraj, N.; Westmacott, K.H.
July 1992
Applied Physics Letters;7/6/1992, Vol. 61 Issue 1, p37
Academic Journal
Analyzes the epitaxial growth of (011) aluminum (Al) on (100) silicon by vapor deposition. Effects of vapor growth at room-temperature; Methods used to characterize the films; List of the orientation variants of the (001) Al pattern.


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