Demonstration of laser-assisted epitaxial deposition of Ge[sub x]Si[sub 1-x] alloys on

Lombardo, S.; Smith, Paul Martin
April 1991
Applied Physics Letters;4/22/1991, Vol. 58 Issue 16, p1768
Academic Journal
Discusses the initial results of a novel technique for epitaxial growth of Ge[sub x]Si[sub 1-x] alloys on single-crystal silicon. Melting and crystallization of the amorphous layer after electron beam deposition; Melt duration versus energy density in single-crystal silicon.


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