Correlation between nucleation site density and residual diamond dust density in diamond film

Ihara, Manabu; Komiyama, Hiroshi
August 1994
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1192
Academic Journal
Demonstrates the deposition of diamond on substrates pre-etched with diamond powder using a microwave plasma chemical vapor deposition method. Determination of the density of the residual diamond dust on the pre-etched substrates; Source of nucleation sites for diamond growth on diamond-etched substrates.


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