Improved step edges on LaAlO[sub 3] substrates by using amorphous carbon etch masks

Yi, H.R.; Ivanov, Z.G.
August 1994
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1177
Academic Journal
Describes a technique for the fabrication of sharp and straight step edges on LaAlO[sub 3] substrates by ion milling. Definition of amorphous carbon films; Determination of the step profile; Fabrication of YBa[sub 2]Cu[sub 3]O[sub 7] step edge junctions; Observation of weak links in step edge junctions.


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