TITLE

Improved step edges on LaAlO[sub 3] substrates by using amorphous carbon etch masks

AUTHOR(S)
Yi, H.R.; Ivanov, Z.G.
PUB. DATE
August 1994
SOURCE
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1177
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a technique for the fabrication of sharp and straight step edges on LaAlO[sub 3] substrates by ion milling. Definition of amorphous carbon films; Determination of the step profile; Fabrication of YBa[sub 2]Cu[sub 3]O[sub 7] step edge junctions; Observation of weak links in step edge junctions.
ACCESSION #
4218190

 

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